Preparation of Titanium Carbide Films by Reactive Sputtering
نویسندگان
چکیده
منابع مشابه
Nanocharacterization of titanium nitride thin films obtained by reactive magnetron sputtering
Titanium nitride thin films are used in applications such as tribological layers for cutting tools, coating of some medical devices (scalpel blades, prosthesis, implants etc.), sensors, electrodes for bioelectronics, microelectronics, diffusion barrier, bio-microelectromechanical systems (Bio-MEMS) and so on. This work is a comparative study concerning the influence of substrate temperature on ...
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Since the discovery of graphene, the quest for two-dimensional (2D) materials has intensified greatly. Recently, a new family of 2D transition metal carbides and carbonitrides (MXenes) was discovered that is both conducting and hydrophilic, an uncommon combination. To date MXenes have been produced as powders, flakes, and colloidal solutions. Herein, we report on the fabrication of ∼1 × 1 cm2 T...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1981
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.24.265